A novel multi-point NBTI characterization methodology using smart intermediate stress (SIS)

被引：15

作者：

Schluender, Christian ^{[1
]}

Hoffmann, Marcel ^{[1
]}

Vollertsen, Rolf-Peter ^{[1
]}

Schindler, Guenther ^{[1
]}

Heinrigs, Wolfgang ^{[1
]}

Gustin, Wolfgang ^{[1
]}

Reisinger, Hans ^{[1
]}

机构：

[1] Infineon Technol AG, Cent Reliabil Methodol, D-81739 Munich, Germany

来源：

2008 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 46TH ANNUAL | 2008年

关键词：

D O I：

10.1109/RELPHY.2008.4558867

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In recent literature several measurement methods were introduced to characterize the V-th-degradation due to NBTI considering the recovery phenomenon. To our knowledge each method has a severe problem or at least a significant disadvantage. Either there are long delay times, the accuracy is not satisfactory or it is not possible to implement the method with customary equipment. A compromise is to perform a one point measurement in the subthreshold region and calculate V-th based on the assumption that the subthreshold slope is not affected by NBTI [I]. In this paper we disprove the universality of this assumption. V-th determination using a one point measurement can lead to imprecise values. This extraction method disregards changes of the subthreshold slope due to NBTI, however a change of the slope impacts the extracted Vth. We clearly demonstrate this effect with our measurements. We introduce a new smart Vth extraction methodology offering both shortest possible delay times with customary equipment and consideration of NBTI-impact on subthreshold slope.

引用

页码：79 / 86

页数：8

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