Deposition of LiTaO3 thin films by pyrosol process

被引：21

作者：

Bornand, V ^{[1
]}

Papet, P ^{[1
]}

Philippot, E ^{[1
]}

机构：

[1] UNIV MONTPELLIER 2,LAB PHYSICOCHIM MAT CONDENSEE,UMR CNRS 5617,F-34095 MONTPELLIER 5,FRANCE

来源：

THIN SOLID FILMS | 1997年 / 304卷 / 1-2期

关键词：

chemical vapour deposition; deposition process; pyrolysis; X-ray diffraction;

D O I：

10.1016/S0040-6090(97)00172-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Lithium tantalate (LiTaO3) thin films with submicron thickness were prepared by the ''pyrosol'' process based on the thermal decomposition on a heated substrate of an aerosol obtained by ultrasonic spraying. The crystalline orientations of the films versus different experimental parameters, like the substrate nature and the deposition temperature, were studied. Crystalline structure analysis of deposited materials showed that LiTaO3 films crystallized successfully with single orientation on c-oriented sapphire substrates, without using post-thermal annealing treatment. (C) 1997 Elsevier Science S.A.

引用

页码：239 / 244

页数：6

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