共 18 条
[2]
STRESS-CONTROL IN REACTIVELY SPUTTERED AIN AND TIN FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:1892-1897
[3]
LAKIN KM, 1974, P IEEE ULTR S IEEE N, P302
[4]
GROWTH OF ALUMINUM NITRIDE FILMS ON SILICON BY ELECTRON-CYCLOTRON-RESONANCE-ASSISTED MOLECULAR-BEAM EPITAXY
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
1992, 31 (12A)
:L1714-L1717
[5]
NYBERG GA, 1954, J VAC SCI TECHNOL A, V2, P301
[6]
ALN THIN-FILMS WITH CONTROLLED CRYSTALLOGRAPHIC ORIENTATIONS AND THEIR MICROSTRUCTURE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:1630-1634
[7]
PREPARATION OF C-AXIS ORIENTED ALN THIN-FILMS BY LOW-TEMPERATURE REACTIVE SPUTTERING
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1992, 31 (10)
:3446-3451
[10]
SHICSAKI T, 1980, APPL PHYS LETT, V36, P643