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Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment

被引：67
作者：
Tsang, W. M.
Wong, F. L.
Fung, M. K.
Chang, J. C.
Lee, C. S.
Lee, S. T. [1 ]
机构：
[1] City Univ Hong Kong, COSDAF, Hong Kong, Hong Kong, Peoples R China
来源：
THIN SOLID FILMS | 2008年 / 517卷 / 02期
关键词：
Transparent conductive oxide; Sol-gel; Sol-gel deposition; Organic light-emitting device; Laser annealing; Optical properties; X-ray diffraction; Scanning electron microscopy;
D O I：
10.1016/j.tsf.2008.08.157
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Aluminum-doped zinc oxide (AZO) films were fabricated at a low substrate temperature (300 degrees C) in air by KrF excimer laser irradiation of sol-gel spin-coated films. Structural, electrical and optical properties of the laser-irradiated films at different laser energies were studied and compared with those prepared by conventional high-temperature processing. The 200 nm laser-irradiated AZO film shows a resistivity of 44 x 10(-3) Omega-cm and about 90% optical transmittance in the visible range upon laser irradiation. The films were oriented preferentially along (002) direction. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：891 / 895
页数：5
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