Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment

被引：67

作者：

Tsang, W. M.

Wong, F. L.

Fung, M. K.

Chang, J. C.

Lee, C. S.

Lee, S. T. ^{[1
]}

机构：

[1] City Univ Hong Kong, COSDAF, Hong Kong, Hong Kong, Peoples R China

来源：

THIN SOLID FILMS | 2008年 / 517卷 / 02期

关键词：

Transparent conductive oxide; Sol-gel; Sol-gel deposition; Organic light-emitting device; Laser annealing; Optical properties; X-ray diffraction; Scanning electron microscopy;

D O I：

10.1016/j.tsf.2008.08.157

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Aluminum-doped zinc oxide (AZO) films were fabricated at a low substrate temperature (300 degrees C) in air by KrF excimer laser irradiation of sol-gel spin-coated films. Structural, electrical and optical properties of the laser-irradiated films at different laser energies were studied and compared with those prepared by conventional high-temperature processing. The 200 nm laser-irradiated AZO film shows a resistivity of 44 x 10(-3) Omega-cm and about 90% optical transmittance in the visible range upon laser irradiation. The films were oriented preferentially along (002) direction. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：891 / 895

页数：5

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