A method for enhanced analysis of specific as-grown carbon nanotubes

被引：4

作者：

Jungen, Alain ^{[1
]}

Stampfer, Christoph ^{[1
]}

Durrer, Lukas ^{[1
]}

Helbling, Thomas ^{[1
]}

Hierold, Christofer ^{[1
]}

机构：

[1] ETH, CH-8092 Zurich, Switzerland

来源：

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2006年 / 243卷 / 13期

关键词：

D O I：

10.1002/pssb.200669173

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We present the design of a microsystem along with a series of process steps to integrate carbon nanotubes in a scalable way that allows them for analysis in various experimental equipments. The microsystems consist of drilled thin silicon layers on top of a substrate which accommodate the nanostructures by chemical vapor deposition (CVD) directly within their drills. These layers can then be manipulated in a way that enables the usage of laboratory apparatus requiring substrate-less samples like transmission electron microscopy. Scanning electron microscopy is used as an analysis tool to identify the presence and location relative to the microsystem structure. Raman microscopy is used subsequently to confirm the detection and location of the nanostructures and to gain insights into their structural properties. The suggested technique is compatible with various CVD'ed nanowires or nanofibers. (c) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：3138 / 3141

页数：4

共 11 条

[1] Carbon nanotubes - the route toward applications [J].