Dependence of the mechanical and structural properties of (Ti,Al)N films on the nitrogen content

被引:9
作者
Jiménez, C [1 ]
Sánchez-Fernández, C
Morant, C
Martínez-Duart, JM
Fernández, M
Sánchez-Olías, J
机构
[1] Univ Autonoma Madrid, Dept Fis Aplicada C12, E-28049 Madrid, Spain
[2] CSIC, Inst Ciencia Mat, E-28049 Madrid, Spain
[3] Ctr Nacl Invest Met, Dept Corros & Protecc, CSIC, Madrid 28040, Spain
关键词
D O I
10.1557/JMR.1999.0378
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
(Ti,Al)N films with increasing nitrogen content were grown by reactive cosputtering and characterized by auger electron spectroscopy, grazing x-ray diffraction, polarization curves, electrochemical impedance spectroscopy, nanoindentation, and atomic force microscopy. For Ti/Al approximate to 1 the Ti1-xAlxN phase is always present, but lower nitrogen contents lead to an additional phase, probably alpha-Ti(Al), which causes a decrease in hardness and Young's modulus. The increase of nitrogen content results in a decrease of surface roughness or a more compacted surface coating, according to the impedance results.
引用
收藏
页码:2830 / 2837
页数:8
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