QUANTITATIVE AUGER-ELECTRON ANALYSIS OF TITANIUM NITRIDES

被引：152

作者：

DAWSON, PT ^{[1
]}

TZATZOV, KK ^{[1
]}

机构：

[1] MCMASTER UNIV,INST MAT RES,HAMILTON L8S 4M1,ONTARIO,CANADA

来源：

SURFACE SCIENCE | 1985年 / 149卷 / 01期

关键词：

D O I：

10.1016/S0039-6028(85)80016-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：105 / 118

页数：14

共 27 条

[1]

ANDERSEN HH, ION IMPLANTATION BEA

[2] TIN COATINGS ON STEEL [J].

BUHL, R ;

PULKER, HK ;

MOLL, E .

THIN SOLID FILMS, 1981, 80 (1-3) :265-270

[3] THERMAL-STABILITY OF TITANIUM NITRIDE FOR SHALLOW JUNCTION SOLAR-CELL CONTACTS [J].

CHEUNG, NW ;

VONSEEFELD, H ;

NICOLET, MA ;

HO, F ;

ILES, P .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (06) :4297-4299

[4] MICROHARDNESS OF TINX COATINGS OBTAINED BY REACTIVE CATHODIC SPUTTERING [J].

CHEVALLIER, J ;

CHABERT, JP .

THIN SOLID FILMS, 1981, 80 (1-3) :263-263

[5] PREPARATION, COMPOSITION AND SOLID-STATE INVESTIGATIONS OF TIN, ZRN, NBN AND COMPOUNDS FROM PSEUDOBINARY SYSTEMS NBN-NBC, NBN-TIC AND NBN-TIN [J].

CHRISTENSEN, AN ;

FREGERSLEV, S .

ACTA CHEMICA SCANDINAVICA SERIES A-PHYSICAL AND INORGANIC CHEMISTRY, 1977, 31 (10) :861-868

[6]

DAVIS LE, 1976, HDB AUGER ELECTRON S

[7]

DAWSON PH, UNPUB

[8] AUGER AND X-RAY CHARACTERIZATION OF SURFACE NITRIDE FILMS ON TI, ZR, AND HF [J].

DAWSON, PT ;

STAZYK, SAJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01) :36-41

[9] AUGER-SPECTRUM SIMULATION TECHNIQUES FOR SURFACE-ANALYSIS OF ALLOYS WITH OVERLAPPING PEAKS - SPUTTERED AND ANNEALED W-MO ALLOYS [J].

DAWSON, PT ;

BURKE, NA .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1983, 31 (04) :355-368

[10] APPLICATION OF AUGER LINE-SHAPES AND FACTOR-ANALYSIS TO CHARACTERIZE A METAL-CERAMIC INTERFACIAL REACTION [J].

GAARENSTROOM, SW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :458-461

← 1 2 3 →