Ion beam induced charge characterisation of a silicon microdosimeter using a heavy ion microprobe

被引:21
作者
Cornelius, I
Siegele, R
Rosenfeld, AB
Cohen, DD
机构
[1] Univ Wollongong, Ctr Med Radiat Phys, Wollongong, NSW 2522, Australia
[2] Australian Nucl Sci & Technol Org, Menai, NSW 2234, Australia
关键词
microprobe; microdosimetry; IBIC;
D O I
10.1016/S0168-583X(01)01316-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
An ion beam induced charge (IBIC) facility has been added to the existing capabilities of the ANSTO heavy ion microprobe and the results of the first measurements are presented. Silicon on insulator (SOI) diode arrays with microscopic junction sizes have recently been proposed as microdosimeters for hadron therapy. A 20 MeV carbon beam was used to perform IBIC imaging of a 10 mum thick SOI device. (C) 2002 Published by Elsevier Science B.V.
引用
收藏
页码:335 / 338
页数:4
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