Development of surface micromachined magnetic actuators using electroplated permalloy

被引：32

作者：

Liu, C ^{[1
]}

机构：

[1] Univ Illinois, Microelect Lab, Microelect Lab 313, Urbana, IL 61801 USA

来源：

MECHATRONICS | 1998年 / 8卷 / 05期

关键词：

D O I：

10.1016/S0957-4158(98)00016-6

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Results on design, fabrication and testing of silicon micromachined magnetic actuators are presented. Magnetic actuators are capable of providing large force (in the order of mN) and large displacement (micrometer to millimeter range) within micro electromechanical devices and systems. Electroplated permalloy (Ni80Fe20) material is the media for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film. Applications of such magnetic actuators in massive parallel assembly and high-yield surface-structure release are discussed. (C) 1998 Elsevier Science Ltd. All rights reserved.

引用

页码：613 / 633

页数：21

共 34 条

[1]

ABE T, 1995, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995, P94, DOI 10.1109/MEMSYS.1995.472547

[2] DEFINED CRYSTAL ORIENTATION OF NICKEL BY CONTROLLED MICROELECTROPLATING [J].

ABEL, S ;

FREIMUTH, H ;

LEHR, H ;

MENSINGER, H .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1994, 4 (02) :47-54

[3]

Ahn C. H., 1993, J MICROELECTROMECH S, V2, P15

[4]

ALLEY RL, 1992, P IEEE SOL STAT SENS, P202

[5]

CLARK WA, 1996, P SOL STAT SENS ACT, P283

[6]

Frisch-Fay R., 1962, Flexible Bars

[7] A decade of MEMS and its future [J].

Fujita, H .

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, :1-8

[8]

GOGOI BP, 1995, P 8 INT C SOL STAT S, V1, P214

[9] FABRICATION OF MICROMECHANICAL DEVICES FROM POLYSILICON FILMS WITH SMOOTH SURFACES [J].

GUCKEL, H ;

SNIEGOWSKI, JJ ;

CHRISTENSON, TR ;

MOHNEY, S ;

KELLY, TF .

SENSORS AND ACTUATORS, 1989, 20 (1-2) :117-122

[10]

Guckel H., 1993, 1993 IEEE WORKSH MIC, P7

← 1 2 3 4 →