Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

被引：45

作者：

Giang, Ut-Binh T.

Lee, Dooyoung

King, Michael R.

DeLouise, Lisa A.

机构：

[1] Univ Rochester, Dept Biomed Engn, Rochester, NY 14627 USA

[2] Univ Rochester, Dept Chem Engn, Rochester, NY 14627 USA

[3] Univ Rochester, Sch Med & Dent, Dept Dermatol, Rochester, NY 14642 USA

来源：

LAB ON A CHIP | 2007年 / 7卷 / 12期

关键词：

D O I：

10.1039/b714742b

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.

引用

页码：1660 / 1662

页数：3

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