Synthesis and optical properties of silicon nanowires grown by different methods

被引:49
作者
Colli, A.
Hofmann, S.
Fasoli, A.
Ferrari, A. C.
Ducati, C.
Dunin-Borkowski, R. E.
Robertson, J. [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
[2] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB3 6GF, England
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2006年 / 85卷 / 03期
关键词
D O I
10.1007/s00339-006-3708-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We review our recent results on the growth and characterization of silicon nanowires (SiNWs). Vapour-phase deposition techniques are considered, including chemical vapour deposition (CVD), plasma-enhanced chemical vapour deposition (PECVD), high-temperature annealing, and thermal evaporation. We present complementary approaches to SiNW production. We investigate the low-temperature (down to 300 degrees C) selective nucleation of SiNWs by Au-catalysed CVD and PECVD. Bulk production of SiNWs is obtained by thermal-vapour deposition from Si/SiO powders in a high-temperature furnace. In this case, SiNWs grow either by condensing on Au catalyst films, or by self-condensation of the vapour in a lower-temperature region of the furnace. Finally, we also achieve controlled growth by thermolysis of nanopatterned, multi-layered Si/Au thin-film precursors. The as-produced wires are compared in terms of yield, structural quality, and optical properties. Raman and photoluminescence spectra of SiNWs are discussed.
引用
收藏
页码:247 / 253
页数:7
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