Synthesis and optical properties of silicon nanowires grown by different methods

被引:49
作者
Colli, A.
Hofmann, S.
Fasoli, A.
Ferrari, A. C.
Ducati, C.
Dunin-Borkowski, R. E.
Robertson, J. [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England
[2] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB3 6GF, England
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2006年 / 85卷 / 03期
关键词
D O I
10.1007/s00339-006-3708-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We review our recent results on the growth and characterization of silicon nanowires (SiNWs). Vapour-phase deposition techniques are considered, including chemical vapour deposition (CVD), plasma-enhanced chemical vapour deposition (PECVD), high-temperature annealing, and thermal evaporation. We present complementary approaches to SiNW production. We investigate the low-temperature (down to 300 degrees C) selective nucleation of SiNWs by Au-catalysed CVD and PECVD. Bulk production of SiNWs is obtained by thermal-vapour deposition from Si/SiO powders in a high-temperature furnace. In this case, SiNWs grow either by condensing on Au catalyst films, or by self-condensation of the vapour in a lower-temperature region of the furnace. Finally, we also achieve controlled growth by thermolysis of nanopatterned, multi-layered Si/Au thin-film precursors. The as-produced wires are compared in terms of yield, structural quality, and optical properties. Raman and photoluminescence spectra of SiNWs are discussed.
引用
收藏
页码:247 / 253
页数:7
相关论文
共 46 条
[31]   Raman spectroscopy of silicon nanowires [J].
Piscanec, S ;
Cantoro, M ;
Ferrari, AC ;
Zapien, JA ;
Lifshitz, Y ;
Lee, ST ;
Hofmann, S ;
Robertson, J .
PHYSICAL REVIEW B, 2003, 68 (24)
[32]   THE ONE PHONON RAMAN-SPECTRUM IN MICROCRYSTALLINE SILICON [J].
RICHTER, H ;
WANG, ZP ;
LEY, L .
SOLID STATE COMMUNICATIONS, 1981, 39 (05) :625-629
[33]   Realization of a silicon nanowire vertical surround-gate field-effect transistor [J].
Schmidt, V ;
Riel, H ;
Senz, S ;
Karg, S ;
Riess, W ;
Gösele, U .
SMALL, 2006, 2 (01) :85-88
[34]   Chainlike silicon nanowires: Morphology, electronic structure and luminescence studies [J].
Sun, XH ;
Wong, NB ;
Li, CP ;
Lee, ST ;
Sham, TK .
JOURNAL OF APPLIED PHYSICS, 2004, 96 (06) :3447-3451
[35]   VAPOR-LIQUID-SOLID MECHANISM OF SINGLE CRYSTAL GROWTH ( NEW METHOD GROWTH CATALYSIS FROM IMPURITY WHISKER EPITAXIAL + LARGE CRYSTALS SI E ) [J].
WAGNER, RS ;
ELLIS, WC .
APPLIED PHYSICS LETTERS, 1964, 4 (05) :89-&
[36]   Growth of silicon nanowires via gold/silane vapor-liquid-solid reaction [J].
Westwater, J ;
Gosain, DP ;
Tomiya, S ;
Usui, S ;
Ruda, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (03) :554-557
[37]   Large-scale hierarchical organization of nanowire arrays for integrated nanosystems [J].
Whang, D ;
Jin, S ;
Wu, Y ;
Lieber, CM .
NANO LETTERS, 2003, 3 (09) :1255-1259
[38]   Electronic states and luminescence in porous silicon quantum dots: The role of oxygen [J].
Wolkin, MV ;
Jorne, J ;
Fauchet, PM ;
Allan, G ;
Delerue, C .
PHYSICAL REVIEW LETTERS, 1999, 82 (01) :197-200
[39]   Controlled growth and structures of molecular-scale silicon nanowires [J].
Wu, Y ;
Cui, Y ;
Huynh, L ;
Barrelet, CJ ;
Bell, DC ;
Lieber, CM .
NANO LETTERS, 2004, 4 (03) :433-436
[40]   Nanoscale silicon wires synthesized using simple physical evaporation [J].
Yu, DP ;
Bai, ZG ;
Ding, Y ;
Hang, QL ;
Zhang, HZ ;
Wang, JJ ;
Zou, YH ;
Qian, W ;
Xiong, GC ;
Zhou, HT ;
Feng, SQ .
APPLIED PHYSICS LETTERS, 1998, 72 (26) :3458-3460