Periodic Large-Area Metallic Split-Ring Resonator Metamaterial Fabrication Based on Shadow Nanosphere Lithography

被引：148

作者：

Gwinner, Michael Christian ^{[1
]}

Koroknay, Elisabeth ^{[1
]}

Fu, Liwei ^{[1
]}

Patoka, Piotr ^{[2
]}

Kandulski, Witold ^{[2
]}

Giersig, Michael ^{[2
]}

Giessen, Harold ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Phys 4, D-70569 Stuttgart, Germany

[2] CAESAR, D-53175 Bonn, Germany

来源：

SMALL | 2009年 / 5卷 / 03期

关键词：

metamaterials; nanolithography; nanoparticles; nanostructures; resonators; NEGATIVE-INDEX METAMATERIALS; INTERFERENCE LITHOGRAPHY; OPTICAL FREQUENCIES; NANOPARTICLES; RESONANCES;

D O I：

10.1002/smll.200800923

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A fast and cheap, large-area (>1 cm(2)), high-coverage fabrication technique for periodic metallic split-ring resonator metamaterials is presented, which allows control of inner- and outer-ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted-angle-rotation thermal evaporation onto Langmuir-Blodgett-type monolayers of close-packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonstrated. Pronounced, tunable optical metamaterial resonances in the range of 100 THz are consistent with simulations.

引用

页码：400 / 406

页数：7

共 20 条

[1] Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].

Campbell, M ;

Sharp, DN ;

Harrison, MT ;

Denning, RG ;

Turberfield, AJ .

NATURE, 2000, 404 (6773) :53-56

[2] Tuneable visible resonances in crescent shaped nano-split-ring resonators [J].

Clark, A. W. ;

Sheridan, A. K. ;

Glidle, A. ;

Cumming, D. R. S. ;

Cooper, J. M. .

APPLIED PHYSICS LETTERS, 2007, 91 (09)

[3] Simultaneous negative phase and group velocity of light in a metamaterial [J].

Dolling, G ;

Enkrich, C ;

Wegener, M ;

Soukoulis, CM ;

Linden, S .

SCIENCE, 2006, 312 (5775) :892-894

[4] Large-area magnetic metamaterials via compact interference lithography [J].

Feth, Nils ;

Enkrich, Christian ;

Wegener, Martin ;

Linden, Stefan .

OPTICS EXPRESS, 2007, 15 (02) :501-507

[5] Large-area metallic photonic crystal fabrication with interference lithography and dry etching [J].

Guo, HC ;

Nau, D ;

Radke, A ;

Zhang, XP ;

Stodolka, J ;

Yang, XL ;

Tikhodeev, SG ;

Gippius, NA ;

Giessen, H .

APPLIED PHYSICS B-LASERS AND OPTICS, 2005, 81 (2-3) :271-275

[6] Thickness dependence of the optical properties of split-ring resonator metamaterials [J].

Guo, Hongcang ;

Liu, Na ;

Fu, Liwei ;

Schweizer, Heinz ;

Kaiser, Stefan ;

Giessen, Harald .

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2007, 244 (04) :1256-1261

[7] Shadow nanosphere lithography: Simulation and experiment [J].

Kosiorek, A ;

Kandulski, W ;

Chudzinski, P ;

Kempa, K ;

Giersig, M .

NANO LETTERS, 2004, 4 (07) :1359-1363

[8] Fabrication of nanoscale rings, dots, and rods by combining shadow nanosphere lithography and annealed polystyrene nanosphere masks [J].

Kosiorek, A ;

Kandulski, W ;

Glaczynska, H ;

Giersig, M .

SMALL, 2005, 1 (04) :439-444

[9] Magnetic response of metamaterials at 100 terahertz [J].

Linden, S ;

Enkrich, C ;

Wegener, M ;

Zhou, JF ;

Koschny, T ;

Soukoulis, CM .

SCIENCE, 2004, 306 (5700) :1351-1353

[10] Three-dimensional photonic metamaterials at optical frequencies [J].

Liu, Na ;

Guo, Hongcang ;

Fu, Liwei ;

Kaiser, Stefan ;

Schweizer, Heinz ;

Giessen, Harald .

NATURE MATERIALS, 2008, 7 (01) :31-37

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