Microwave plasmas at atmospheric pressure: theoretical insight and applications in surface treatment

被引：9

作者：

Belmonte, T. ^{[1
]}

Cardoso, R. P. ^{[1
]}

Noel, C. ^{[1
]}

Henrion, G. ^{[1
]}

Kosior, F. ^{[1
]}

机构：

[1] Nancy Univ, CNRS, Lab Sci & Genie Surfaces, F-54042 Nancy, France

来源：

EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS | 2008年 / 42卷 / 01期

关键词：

D O I：

10.1051/epjap:2008022

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This work is an assessment of recent developments on microwave plasmas at atmospheric pressure and their applications in the field of surface treatment. A special attention is paid to the question of the accuracy of data at high temperature (above 2000 K) and to the non-locality of the energy dissipation in argon and helium plasmas.

引用

页码：41 / 46

页数：6

共 39 条

[1] Microwave plasma jet for material processing at 2.45 GHz [J].

Al-Shamma'a, AI ;

Wylie, SR ;

Lucas, J ;

Stuart, RA .

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2002, 121 (01) :143-147

[2] Design and construction of a 2.45 GHz waveguide-based microwave plasma jet at atmospheric pressure for material processing [J].

Al-Shamma's, AI ;

Wylie, SR ;

Lucas, J ;

Pau, CF .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (18) :2734-2741

[3]

Aliev Y. M., 2000, SPR S ATOMS, V24

[4] A non-local hydrodynamic approach to plasma heating in surface wave sustained discharges [J].

Aliev, YM ;

Schluter, H ;

Shivarova, A .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (03) :514-516

[5] Radial description of excitation processes of molecular and atomic species in a high-pressure helium microwave plasma torch [J].

Alvarez, R ;

Quintero, MC ;

Rodero, A .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2005, 38 (20) :3768-3777

[6] EXCIMERS [J].

BIRKS, JB .

REPORTS ON PROGRESS IN PHYSICS, 1975, 38 (08) :903-974

[7] TEMPERATURE-DEPENDENCE OF THE MOBILITY AND ASSOCIATION RATE COEFFICIENT OF HE+-IONS IN HE FROM 30-350-K [J].

BOHRINGER, H ;

GLEBE, W ;

ARNOLD, F .

JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1983, 16 (14) :2619-2626

[8] Characterisation of thin silica films deposited on carbon fibre by an atmospheric pressure non-equilibrium plasma (APNEP) [J].

Brown, M ;

Hayes, P ;

Prangnell, P .

COMPOSITES PART A-APPLIED SCIENCE AND MANUFACTURING, 2002, 33 (10) :1403-1408

[9] Dissociative recombination of He2+ molecular ions [J].

Carata, L ;

Orel, AE ;

Suzor-Weiner, A .

PHYSICAL REVIEW A, 1999, 59 (04) :2804-2812

[10] Influence of impurities on the temperature of an atmospheric helium plasma in microwave resonant cavity [J].

Cardoso, R. P. ;

Belmonte, T. ;

Keravec, P. ;

Kosior, F. ;

Henrion, G. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (05) :1394-1400

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