Vacuum arc deposited boron carbide films for fusion plasma facing components

被引:10
作者
Klepper, CC
Niemel, J
Hazelton, RC
Yadlowsky, EJ
Monteiro, OR
机构
[1] HY Tech Res Corp, Radford, VA 24141 USA
[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
来源
FUSION TECHNOLOGY | 2001年 / 39卷 / 02期
关键词
D O I
10.13182/FST01-A11963356
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
Boron carbide is an ideal coating for radiofrequency antennas in magnetic fusion energy, due to a combination of desirable properties: high hardness at high temperature, high melting point, low Z and high thermal conductivity. In this paper, the feasibility of using vacuum are technology for coating antennas and other magnetic fusion energy plasma facing components is explored. This technique has the potential of producing much denser film than plasma spray and substantially higher deposition rates than magnetron sputtering. Tn addition, the use of hyper-thermal species may result in the formation of high thermal conductivity crystalline phase at lower deposition temperatures than would otherwise be expected. Finally, the compatibility of the vacuum are with ultra-high vacuum conditions raises the possibility of in situ repair of components in a fusion reactor. Initial deposition studies are presented, which produced primarily amorphous film, but with the correct stoichiometry and a high deposition rate (>10nm/s). The properties of this film are presented in this paper. Some of the properties of the vacuum are discharge, the first to be operated successfully with a sintered boron carbide cathode, are also presented.
引用
收藏
页码:910 / 915
页数:6
相关论文
共 31 条
[1]  
Agarici G, 1996, FUSION TECHNOL, V29, P417
[2]   Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review [J].
Anders, A .
SURFACE & COATINGS TECHNOLOGY, 1999, 120 :319-330
[3]   ON MODES OF ARC CATHODE OPERATION [J].
ANDERS, S ;
ANDERS, A .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (01) :20-24
[4]   AMORPHOUS SI THIN-FILMS PREPARED BY VACUUM ARC DEPOSITION [J].
ARBILLY, D ;
BOXMAN, RL ;
GOLDSMITH, S ;
ROTHWARF, A ;
KAPLAN, L .
THIN SOLID FILMS, 1994, 253 (1-2) :62-66
[5]  
ARBILLY D, 1997, P 8 SEDE BOQUER S SO, V3, P215
[6]   Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs [J].
Bilek, MMM ;
Martin, PJ ;
McKenzie, DR .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) :2965-2970
[7]   Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon [J].
Bilek, MMM ;
Milne, WI .
THIN SOLID FILMS, 1996, 290 :299-304
[8]   Electronic properties and impurity levels in filtered cathodic vacuum are (FCVA) amorphous silicon [J].
Bilek, MMM ;
Milne, WI .
THIN SOLID FILMS, 1997, 308 :79-84
[9]   Cathodic arc deposition of films [J].
Brown, IG .
ANNUAL REVIEW OF MATERIALS SCIENCE, 1998, 28 :243-269
[10]   Thermal conductivity of amorphous carbon thin films [J].
Bullen, AJ ;
O'Hara, KE ;
Cahill, DG ;
Monteiro, O ;
von Keudell, A .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (11) :6317-6320