The addition of functional groups to silicon via hydrosilation of 1-alkynes at hydrogen-terminated, 1 x 1 reconstructed, (100) silicon surfaces

被引:29
作者
Cerofolini, GF [1 ]
Galati, C [1 ]
Reina, S [1 ]
Renna, L [1 ]
机构
[1] STMicroelect, I-95121 Catania, Italy
关键词
D O I
10.1088/0268-1242/18/6/305
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work presents a study based on x-ray photoelectron spectroscopy of the reaction of hydrogen-terminated silicon with 1-alkynes as a route for the functionalization of the (100) surface of silicon. The study (i) demonstrates that the grafting of hydrocarbon moieties is possible by simple exposure of the silicon surface to a liquid alkyne, (ii) shows that the derivatization protects the silicon against oxidation in air, (iii) indicates that the process occurs via hydrosilation of the alkyne at the hydrogen-terminated surface and (iv) suggests that grafted moieties contain in large part an unreacted pi bond.
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收藏
页码:423 / 429
页数:7
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