Surface smoothing induced by epitaxial Si capping of rough and strained Ge or Si1-xGex morphologies:: a RHEED and TEM study

The same Si/Ge/Si or Si/Si1 - xGex/Si structures grown at 400 degrees C on Si(0 0 1) are compared, either in real time by reflection high-energy electron diffraction (RHEED) or on the final product by transmission electron microscopy (TEM). This allows us to follow interface morphology variations during Si re-growth upon Ge containing layers of various Ge thicknesses or alloy x fractions. As shown by the passage from spotty to streaky RHEED patterns and by specular beam intensity oscillation evolutions, the surfaces roughen systematically during strained Ge or Si1 - xGex (SiGe) growth and smooth rapidly during subsequent growth of 4 to 6 Si monolayers, at least in the elastic hut-clustering islanding range with {1 0 5} facets. With the help of TEM examinations, a coherent picture may be proposed for these surface smoothing observations: (i) A dominant mechanism in form of a quick Si surface diffusion occurring initially on the Ge-strained surfaces. It ensures a heteregeneous Si accumulation towards the places of minimized misfit, i.e., in the troughs of the Ge or SiGe morphologies. (ii) A slower Ge diffusion (as occuring on Si) depleting the emerging island crests and contributing to an overall Ge surface termination (Ge surface segregation) and to a complementary island smoothing. The latter mechanism, only important at low growth kinetics, favours the formation of alloyed interfaces as a by-product of the island smoothing and lateral intermixing. At high Si growth kinetics the former mechanism prevails leading to better preserved island morphologies and final interfaces appearing chemically more abrupt but less flat. (C) 1998 Elsevier Science B.V. All rights reserved.