Fabrication of graded Cu(InGa)Se2 films by inline evaporation

被引:10
作者
Hanket, GM [1 ]
Paulson, PD [1 ]
Singh, U [1 ]
Junkert, ST [1 ]
Birkmire, RW [1 ]
Doyle, FJ [1 ]
Eser, E [1 ]
Shafarman, WN [1 ]
机构
[1] Univ Delaware, Inst Energy Convers, Newark, DE 19716 USA
来源
CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000 | 2000年
关键词
D O I
10.1109/PVSC.2000.915881
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
An inline evaporation system for depositing Cu(InGa)Se-2 films from elemental sources was characterized. The system demonstrated reproducibly good deposition uniformity and device performance for translation speeds ranging from 1 to 2.5 inches/min. A source effusion model predicting film thickness, composition, and compositional gradients was developed and tested. The effusion model was reasonably successful in predicting measured film characteristics. The model can be further improved by a more accurate description of the flux profiles. In addition, effusion in the transitional flow regime and the possibility of Ga-In interdiffusion need to be explored. Such an improved model would be a valuable tool for the design and development of commercial scale systems, as well as for improved efficiency and flexibility in manufacturing.
引用
收藏
页码:499 / 504
页数:6
相关论文
共 13 条
[1]  
[Anonymous], 1998, Proceeding of the 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion
[2]   The beam shaping in the molecular flow. [J].
Clausing, P. .
ZEITSCHRIFT FUR PHYSIK, 1930, 66 (7-8) :471-476
[3]   STRUCTURE AND PROPERTIES OF HIGH-EFFICIENCY ZNO CDZNS CUINGASE2 SOLAR-CELLS [J].
DEVANEY, WE ;
CHEN, WS ;
STEWART, JM ;
MICKELSEN, RA .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1990, 37 (02) :428-433
[4]   MOLECULAR-BEAM DISTRIBUTIONS FROM HIGH-RATE SOURCES [J].
JACKSON, SC ;
BARON, BN ;
ROCHELEAU, RE ;
RUSSELL, TWF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (05) :1916-1920
[5]  
KENNARD EH, 1938, KINETIC THEORY GASES, P306
[6]   IMPROVED METHOD OF NONINTRUSIVE DEPOSITION RATE MONITORING BY ATOMIC-ABSORPTION SPECTROSCOPY FOR PHYSICAL VAPOR-DEPOSITION PROCESSES [J].
LU, C ;
GUAN, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :1797-1801
[7]   Phases, morphology, and diffusion in CuInxGa1-xSe2 thin films [J].
Marudachalam, M ;
Birkmire, RW ;
Hichri, H ;
Schultz, JM ;
Swartzlander, A ;
AlJassim, MM .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (06) :2896-2905
[8]  
NIEMI E, 1996, 25 IEEE PVSC, P801
[9]  
POWALLA M, 1997, 14 EUR PHOT SOL EN C, P1270
[10]   ANALYSIS OF EVAPORATION OF CADMIUM-SULFIDE FOR MANUFACTURE OF SOLAR-CELLS [J].
ROCHELEAU, RE ;
BARON, BN ;
RUSSELL, TWF .
AICHE JOURNAL, 1982, 28 (04) :656-662