Formation of c-axis oriented ZnO optical waveguides by radio-frequency magnetron sputtering

被引：48

作者：

Jia, CL ^{[1
]}

Wang, KM

Wang, XL

Zhang, XJ

Lu, F

机构：

[1] Shandong Univ, Dept Phys, Jinan 250100, Peoples R China

[2] Shandong Univ, Sch Informat Sci & Engn, Jinan 250100, Peoples R China

来源：

OPTICS EXPRESS | 2005年 / 13卷 / 13期

关键词：

D O I：

10.1364/OPEX.13.005093

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

ZnO/Mg0.16Zn0.84O ( ZnO/MgZnO) films are fabricated on x-cut and z-cut LiNbO3 ( LN) substrates by radio-frequency magnetron sputtering. High transparencies are confirmed by a spectrophotometer. X-ray diffraction ( XRD) spectra show that all the films are c-axis oriented. The waveguiding properties, as well as the refractive indices and thickness of the films are demonstrated and determined by prism coupling. Both transverse electric ( TE) and transverse magnetic ( TM) modes are measured lambda.= 0.633 mu m and 1.539 mu m, respectively. The waveguide loss is measured at lambda.= 0.633 mu m with a fiber probe technique. The experimental results show that high optical quality ZnO films can be obtained with MgZnO buffer layers. (C) 2005 Optical Society of America

引用

页码：5093 / 5099

页数：7

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