PREPARATION OF C-AXIS ORIENTED ZNO OPTICAL WAVE-GUIDING FILMS ON FUSED-SILICA BY PULSED-LASER REACTIVE ABLATION

被引：37

作者：

HU, WS

LIU, ZG

GUO, XL

LIN, C

ZHU, SN

FENG, D

机构：

[1] NANJING UNIV,NATL LAB SOLID STATE MICROSTRUCT,NANJING 210093,PEOPLES R CHINA

[2] NANJING UNIV,INST SOLID STATE PHYS,NANJING 210093,PEOPLES R CHINA

[3] NANJING UNIV,CTR MAT ANAL,NANJING 210093,PEOPLES R CHINA

来源：

MATERIALS LETTERS | 1995年 / 25卷 / 1-2期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1016/0167-577X(95)00144-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

c-axis oriented ZnO thin films have been deposited on fused silica by pulsed laser reactive ablation using a Zn target. The films are polycrystalline, transparent, smooth, dense and crackfree. The influence of the deposition parameters on film quality has been discussed. The fwhm of the (002) X-ray reflection peak reaches its minimum of 0.320 degrees at substrate temperatures of 375-425 degrees C. The refractive index of the film versus wavelength has been determined. Favorable optical waveguiding property has been demonstrated by observation of sharp m-lines from the TE mode.

引用

页码：5 / 8

页数：4

共 12 条

[1]

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