Post-treatment method of producing ordered array of anodic aluminum oxide using general purity commercial (99.7%) aluminum

被引:43
作者
Chen, CC [1 ]
Chen, JH [1 ]
Chao, CG [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 03期
关键词
aluminum; anodized; AAO; self-diffusion; nanochannels;
D O I
10.1143/JJAP.44.1529
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new and simplified method of fabricating anodic aluminum oxide has been developed. This new method uses anodization but follows a route different from the commonly known 1- or 2-step anodization. General-purity (99.7%) commercial aluminum is used instead of the high-purity aluminum required in conventional anodization. The disordered arrangements of pores that initially form on the surface of aluminum rearranged by self-diffusion inside the anodic aluminum oxide (AAO) layer via long-term heat treatment. The enlargement of the pores on AAO that crystallized to gamma phase was achieved by pore widening. Uniformly distributed nanopores with a diameter of 75 nm and wall a thickness of 16 nm were formed on a 9 pm thick AAO film. These ordered nanochannels were obtained over an area of several square millimeters, with a density of 1.4 x 10(10) pores per cm(2).
引用
收藏
页码:1529 / 1533
页数:5
相关论文
共 27 条
[21]  
Sunil K.T., 2002, CHAOS, V12, P240
[22]   POROUS ANODIC FILM FORMATION ON ALUMINUM [J].
THOMPSON, GE ;
WOOD, GC .
NATURE, 1981, 290 (5803) :230-232
[23]  
THOMPSON GE, 1980, T I MET FINISH, V58, P21
[24]   NANOCHANNEL ARRAY GLASS [J].
TONUCCI, RJ ;
JUSTUS, BL ;
CAMPILLO, AJ ;
FORD, CE .
SCIENCE, 1992, 258 (5083) :783-785
[25]  
WOHLBIER FH, 1969, DIFFUSION DEFECT DAT, V3, P469
[26]  
WOHLBIER FH, 1967, DIFFUSION DEFECT DAT, V1, P2
[27]  
WOHLBIER FH, 1981, DIFFUSION DEFECT DAT, V24, P75