Successive ionic layer adsorption and reaction (SILAR) method for the deposition of large area (∼10 cm2) tin disulfide (SnS2) thin films

被引:83
作者
Sankapal, BR [1 ]
Mane, RS [1 ]
Lokhande, CD [1 ]
机构
[1] Shivaji Univ, Dept Phys, Thin Film Phys Lab, Kolhapur 416004, Maharashtra, India
关键词
semiconductors; thin films; chemical synthesis; X-ray diffraction;
D O I
10.1016/S0025-5408(00)00405-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Simple and versatile, the successive ionic layer adsorption and reaction (SILAR) method was used to prepare large area (similar to 10 cm(2)) SnS2 thin films of about 1.0 mum thickness, under optimized deposition conditions. The films were grown on amorphous glass and single crystal wafer of Si(111) to study the effect of substrate on the microstructure of the films. The SnS2 films on glass substrate were amorphous or consisted of fine grains, while nanocrystalline grain growth was observed in filmes on single crystalline Si(111) substrate. The surface morphology of SnS2 film on the glass substrate looked relatively smooth and homogeneous in the scanning electron microscopy (SEM) image. The SnS2 film exhibited n-type electrical conductivity, and had an optical bandgap of 2.6 eV. The room temperature electrical resistivity was of the order of 10(3) Omega -cm. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:2027 / 2035
页数:9
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