Determination of maximum allowable strain for polysilicon micro-devices

被引：12

作者：

Bromley, SC ^{[1
]}

Howell, LL ^{[1
]}

Jensen, BD ^{[1
]}

机构：

[1] Brigham Young Univ, Dept Mech Engn, Provo, UT 84602 USA

来源：

ENGINEERING FAILURE ANALYSIS | 1999年 / 6卷 / 01期

关键词：

brittle fracture; electronic-device failures; micro-mechanical systems; strain analysis;

D O I：

10.1016/S1350-6307(98)00028-4

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Polycrystalline silicon (polysilicon) is a material commonly used for micro-electro-mechanical systems (MEMS) for which reliable mechanical properties data is not available, especially for devices that have dimensions on the order of microns. This paper proposes a method for using test data that accounts for the uncertainties in mechanical properties and presents data from tests of polysilicon that may be used in the future design of polysilicon MEMS. The testing of 161 micro-devices to failure, results in a recommendation for design that the nominal strain be maintained below 0.0055. (C) 1998 Elsevier Science Ltd. All rights reserved.

引用

页码：27 / 41

页数：15

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