Copper deposition in the presence of polyethylene glycol - II. Electrochemical impedance spectroscopy

被引：195

作者：

Kelly, JJ ^{[1
]}

West, AC ^{[1
]}

机构：

[1] Columbia Univ, Dept Chem Engn, New York, NY 10027 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1998年 / 145卷 / 10期

关键词：

D O I：

10.1149/1.1838830

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Electrochemical impedance spectroscopy (EIS) results are shown and interpreted with regard to other recent experimental studies for copper deposition in the presence of polyethylene glycol and Cl-. The model assumes the adsorption of a nearly complete monolayer of PEG in the presence of chloride ions and no adsorption without Cl-. The primary effect of PEG adsorption which does not appear to vary with time during an EIS measurement, is a blocking of available surface sites for charge transfer. The model effectively predicts changes in steady-state and EIS results with changes in Cl- concentration and rotation rate on a rotating disk electrode.

引用

页码：3477 / 3481

页数：5

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