Cryogenic scanning probe characterization of semiconductor nanostructures

被引:134
作者
Eriksson, MA
Beck, RG
Topinka, M
Katine, JA
Westervelt, RM
Campman, KL
Gossard, AC
机构
[1] HARVARD UNIV, DEPT PHYS, CAMBRIDGE, MA 02138 USA
[2] UNIV CALIF SANTA BARBARA, DEPT MAT, SANTA BARBARA, CA 93106 USA
关键词
D O I
10.1063/1.117801
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate the use of a scanned probe microscope (SPM) at 4 Kelvin to study electron transport through a ballistic point contact in the two-dimensional electron gas inside a GaAs/AlGaAs heterostructure. The electron gas density profile is locally perturbed by the charged SPM tip providing information about the electron flow through the point contact. As the tip is scanned, one obtains a spatial image of the ballistic electron flux as well as the topographic profile of the structure. Calculations indicate the spatial resolution is comparable to the electron gas depth. (C) 1996 American Institute of Physics.
引用
收藏
页码:671 / 673
页数:3
相关论文
共 12 条
[1]   LATERAL DOPANT PROFILING IN SEMICONDUCTORS BY FORCE MICROSCOPY USING CAPACITIVE DETECTION [J].
ABRAHAM, DW ;
WILLIAMS, C ;
SLINKMAN, J ;
WICKRAMASINGHE, HK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :703-706
[2]   LOW-TEMPERATURE FORCE MICROSCOPE WITH ALL-FIBER INTERFEROMETER [J].
ALBRECHT, TR ;
GRUTTER, P ;
RUGAR, D ;
SMITH, DPE .
ULTRAMICROSCOPY, 1992, 42 :1638-1646
[3]  
[Anonymous], SCANNING TUNNELING M
[4]   QUENCHING OF THE HALL RESISTANCE IN BALLISTIC MICROSTRUCTURES - A COLLIMATION EFFECT [J].
BARANGER, HU ;
STONE, AD .
PHYSICAL REVIEW LETTERS, 1989, 63 (04) :414-417
[5]  
BEENAKKER CWJ, 1991, SOLID STATE PHYS, V44, P1
[6]  
DREYER M, 1995, APPL PHYS A-MATER, V61, P357
[7]   QUANTITATIVE 2-DIMENSIONAL DOPANT PROFILE MEASUREMENT AND INVERSE MODELING BY SCANNING CAPACITANCE MICROSCOPY [J].
HUANG, Y ;
WILLIAMS, CC ;
SLINKMAN, J .
APPLIED PHYSICS LETTERS, 1995, 66 (03) :344-346
[8]   HIGH-RESOLUTION CAPACITANCE MEASUREMENT AND POTENTIOMETRY BY FORCE MICROSCOPY [J].
MARTIN, Y ;
ABRAHAM, DW ;
WICKRAMASINGHE, HK .
APPLIED PHYSICS LETTERS, 1988, 52 (13) :1103-1105
[9]   ELECTRON-BEAM COLLIMATION WITH A QUANTUM POINT CONTACT [J].
MOLENKAMP, LW ;
STARING, AAM ;
BEENAKKER, CWJ ;
EPPENGA, R ;
TIMMERING, CE ;
WILLIAMSON, JG ;
HARMANS, CJPM ;
FOXON, CT .
PHYSICAL REVIEW B, 1990, 41 (02) :1274-1277
[10]   DELINEATION OF SEMICONDUCTOR DOPING BY SCANNING RESISTANCE MICROSCOPY [J].
SHAFAI, C ;
THOMSON, DJ ;
SIMARDNORMANDIN, M ;
MATTIUSSI, G ;
SCANLON, PJ .
APPLIED PHYSICS LETTERS, 1994, 64 (03) :342-344