Deposition of indium tin oxide films by laser ablation: Processing and characterization

被引：22

作者：

Cali, C

Mosca, M

Targia, G

机构：

[1] Univ Palermo, INFM, I-90128 Palermo, Italy

[2] Univ Palermo, Dipartimento Ingn Elettr, I-90128 Palermo, Italy

来源：

SOLID-STATE ELECTRONICS | 1998年 / 42卷 / 05期

关键词：

D O I：

10.1016/S0038-1101(98)00084-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work an indium tin oxide thin film fabrication technique based on pulsed laser deposition is described and the electrical, optical and mechanical properties of the deposited films are reported. Deposition of high quality films on cold substrates was proved. The third harmonic (355 nm) of an Nd:YAG laser was employed to photoablade the indium tin oxide target. (C) 1998 Elsevier Science Ltd. All rights reserved.

引用

页码：877 / 879

页数：3

共 8 条

[1] LASER DEPOSITION OF EPITAXIAL TITANIUM NITRIDE FILMS ON (100) MGO
BIUNNO, N
NARAYAN, J
SRIVATSA, AR
HOLLAND, OW
[J]. APPLIED PHYSICS LETTERS, 1989, 55 (04) : 405 - 407
[2] ABLATION OF METAL-FILMS BY PICOSECOND LASER-PULSES IMAGED WITH HIGH-SPEED ELECTRON-MICROSCOPY
BOSTANJOGLO, O
NIEDRIG, R
WEDEL, B
[J]. JOURNAL OF APPLIED PHYSICS, 1994, 76 (05) : 3045 - 3048
[3] STUDY OF FILM GROWTH FROM EXCIMER LASER-INDUCED ABLATION OF CDS
CALI, C
LAROSA, F
TARGIA, G
ROBBA, D
[J]. JOURNAL OF APPLIED PHYSICS, 1995, 78 (10) : 6265 - 6269
[4] EVAPORATED SN-DOPED IN2O3 FILMS - BASIC OPTICAL-PROPERTIES AND APPLICATIONS TO ENERGY-EFFICIENT WINDOWS
HAMBERG, I
GRANQVIST, CG
[J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (11) : R123 - R159
[5] Horwitz JS., 1994, PULSED LASER DEPOSIT
[6] Macleod H. A., 1986, THIN FILM OPTICAL FI
[7] LOW-RESISTIVITY INDIUM TIN OXIDE-FILMS BY PULSED-LASER DEPOSITION
ZHENG, JP
KWOK, HS
[J]. APPLIED PHYSICS LETTERS, 1993, 63 (01) : 1 - 3
[8] ROLE OF THE OXYGEN ATOMIC-BEAM IN LOW-TEMPERATURE GROWTH OF SUPERCONDUCTING FILMS BY LASER DEPOSITION
ZHENG, JP
YING, QY
WITANACHCHI, S
HUANG, ZQ
SHAW, DT
KOWK, HS
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (10) : 954 - 956

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