LASER DEPOSITION OF EPITAXIAL TITANIUM NITRIDE FILMS ON (100) MGO

被引：27

作者：

BIUNNO, N ^{[1
]}

NARAYAN, J ^{[1
]}

SRIVATSA, AR ^{[1
]}

HOLLAND, OW ^{[1
]}

机构：

[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.101881

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：405 / 407

页数：3

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