LOW-TEMPERATURE PROCESSING OF TITANIUM NITRIDE FILMS BY LASER PHYSICAL VAPOR-DEPOSITION

被引：56

作者：

BIUNNO, N

NARAYAN, J

HOFMEISTER, SK

SRIVATSA, AR

SINGH, RK

机构：

来源：

关键词：

D O I：

10.1063/1.101338

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1519 / 1521

页数：3

共 10 条

[1] BIUNNO N, UNPUB
[2] QUANTITATIVE AUGER-ELECTRON ANALYSIS OF TITANIUM NITRIDES
DAWSON, PT
TZATZOV, KK
[J]. SURFACE SCIENCE, 1985, 149 (01) : 105 - 118
[3] BOND STRENGTH OPTIMIZATION OF PLASMA-SPRAYED CR2O3 LAYERS BY FACTORIAL 2-LEVEL EXPERIMENTS
FUNK, W
GOEBE, F
[J]. THIN SOLID FILMS, 1985, 128 (1-2) : 45 - 55
[4] FORMATION OF THIN SUPERCONDUCTING FILMS BY THE LASER PROCESSING METHOD
NARAYAN, J
BIUNNO, N
SINGH, R
HOLLAND, OW
AUCIELLO, O
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (22) : 1845 - 1847
[5] AUGER-ELECTRON SPECTROSCOPY TECHNIQUE FOR NITROGEN DEPTH PROFILING IN TITANIUM COMPOUNDS
PANTEL, R
LEVY, D
NICOLAS, D
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (05): : 2953 - 2956
[6] RENGAN A, 1988, SE REGIONAL M AM PHY
[7] Toth L., 1971, TRANSITION METAL CAR
[8] VULKONEN E, 1983, 1983 P SPIE INT TECH, V401, P41
[9] ELECTRICAL CHARACTERISTICS OF TIN CONTACTS TO N-SILICON
WITTMER, M
STUDER, B
MELCHIOR, H
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (09) : 5722 - 5726
[10] ZEGA B, 1977, THIN SOLID FILMS, V54, P577