AUGER-ELECTRON SPECTROSCOPY TECHNIQUE FOR NITROGEN DEPTH PROFILING IN TITANIUM COMPOUNDS

被引：23

作者：

PANTEL, R

LEVY, D

NICOLAS, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期

关键词：

D O I：

10.1116/1.575458

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2953 / 2956

页数：4

共 20 条

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