Characterization of Graphene Films and Transistors Grown on Sapphire by Metal-Free Chemical Vapor Deposition

被引:157
作者
Fanton, Mark A. [1 ]
Robinson, Joshua A. [1 ,2 ]
Puls, Conor [3 ]
Liu, Ying [3 ]
Hollander, Matthew J. [2 ]
Weiland, Brian E. [1 ]
LaBella, Michael [1 ]
Trumbull, Kathleen [1 ]
Kasarda, Richard [1 ]
Howsare, Casey [1 ,2 ]
Stitt, Joseph [4 ]
Snyder, David W. [1 ,5 ]
机构
[1] Penn State Univ, Ctr Electroopt, University Pk, PA 16802 USA
[2] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA
[3] Penn State Univ, Dept Phys, University Pk, PA 16802 USA
[4] Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA
[5] Penn State Univ, Dept Chem Engn, University Pk, PA 16802 USA
关键词
graphene; chemical vapor deposition; sapphire; mobility; Hall effect; EPITAXIAL-GRAPHENE; LARGE-AREA; MOBILITY; LAYER;
D O I
10.1021/nn202643t
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We present a novel method for the direct metal-free growth of graphene on sapphire that yields high quality films comparable to that of graphene grown on SiC by sublimation. Graphene is synthesized on sapphire via the simple decomposition of methane at 1425-1600 degrees C. Film quality was found to be a strong function of growth temperature. The thickness, structure, Interface characteristics, and electrical transport properties were characterized in order to understand the utility of this material for electronic devices. Graphene synthesized on sapphire Is found to be strain relieved, with no evidence of an interfacial buffer layer. There is a strong correlation between the graphene structural quality and carrier mobility. Room temperature Hall effect mobility values were as high as 3000 cm(2)/(V s), while measurements at 2 K reached values of 10 500 cm(2)/(V s). These films also display evidence of the quantum Hall effect. Field effect transistors fabricated from this material had a typical current density of 200 mA/mm and transconductance of 40 mS/mm indicating that material performance may be comparable to graphene on SIC.
引用
收藏
页码:8062 / 8069
页数:8
相关论文
共 36 条
[1]   Electronic confinement and coherence in patterned epitaxial graphene [J].
Berger, Claire ;
Song, Zhimin ;
Li, Xuebin ;
Wu, Xiaosong ;
Brown, Nate ;
Naud, Cecile ;
Mayou, Didier ;
Li, Tianbo ;
Hass, Joanna ;
Marchenkov, Atexei N. ;
Conrad, Edward H. ;
First, Phillip N. ;
de Heer, Wait A. .
SCIENCE, 2006, 312 (5777) :1191-1196
[2]   Technique for the Dry Transfer of Epitaxial Graphene onto Arbitrary Substrates [J].
Caldwell, Joshua D. ;
Anderson, Travis J. ;
Culbertson, James C. ;
Jernigan, Glenn G. ;
Hobart, Karl D. ;
Kub, Fritz J. ;
Tadjer, Marko J. ;
Tedesco, Joseph L. ;
Hite, Jennifer K. ;
Mastro, Michael A. ;
Myers-Ward, Rachael L. ;
Eddy, Charles R., Jr. ;
Campbell, Paul M. ;
Gaskill, D. Kurt .
ACS NANO, 2010, 4 (02) :1108-1114
[3]   General equation for the determination of the crystallite size La of nanographite by Raman spectroscopy [J].
Cançado, LG ;
Takai, K ;
Enoki, T ;
Endo, M ;
Kim, YA ;
Mizusaki, H ;
Jorio, A ;
Coelho, LN ;
Magalhaes-Paniago, R ;
Pimenta, MA .
APPLIED PHYSICS LETTERS, 2006, 88 (16)
[4]  
Cassell AM, 1999, J PHYS CHEM B, V103, P6484, DOI 10.1021/jp990957sCCC:$18.00
[5]   Interaction, growth, and ordering of epitaxial graphene on SiC{0001} surfaces: A comparative photoelectron spectroscopy study [J].
Emtsev, K. V. ;
Speck, F. ;
Seyller, Th. ;
Ley, L. ;
Riley, J. D. .
PHYSICAL REVIEW B, 2008, 77 (15)
[6]   Evidence of Structural Strain in Epitaxial Graphene Layers on 6H-SiC(0001) [J].
Ferralis, Nicola ;
Maboudian, Roya ;
Carraro, Carlo .
PHYSICAL REVIEW LETTERS, 2008, 101 (15)
[7]   Spatially resolved raman spectroscopy of single- and few-layer graphene [J].
Graf, D. ;
Molitor, F. ;
Ensslin, K. ;
Stampfer, C. ;
Jungen, A. ;
Hierold, C. ;
Wirtz, L. .
NANO LETTERS, 2007, 7 (02) :238-242
[8]   Epitaxial growth of graphitic carbon on C-face SiC and sapphire by chemical vapor deposition (CVD) [J].
Hwang, Jeonghyun ;
Shields, Virgil B. ;
Thomas, Christopher I. ;
Shivaraman, Shriram ;
Hao, Dong ;
Kim, Moonkyung ;
Woll, Arthur R. ;
Tompa, Gary S. ;
Spencer, Michael G. .
JOURNAL OF CRYSTAL GROWTH, 2010, 312 (21) :3219-3224
[9]   Direct Chemical Vapor Deposition of Graphene on Dielectric Surfaces [J].
Ismach, Ariel ;
Druzgalski, Clara ;
Penwell, Samuel ;
Schwartzberg, Adam ;
Zheng, Maxwell ;
Javey, Ali ;
Bokor, Jeffrey ;
Zhang, Yuegang .
NANO LETTERS, 2010, 10 (05) :1542-1548
[10]   Graphene-on-Insulator Transistors Made Using C on Ni Chemical-Vapor Deposition [J].
Kedzierski, Jakub ;
Hsu, Pei-Lan ;
Reina, Alfonso ;
Kong, Jing ;
Healey, Paul ;
Wyatt, Peter ;
Keast, Craig .
IEEE ELECTRON DEVICE LETTERS, 2009, 30 (07) :745-747