Graphene-on-Insulator Transistors Made Using C on Ni Chemical-Vapor Deposition

被引:83
作者
Kedzierski, Jakub [1 ]
Hsu, Pei-Lan [2 ]
Reina, Alfonso [2 ]
Kong, Jing [2 ]
Healey, Paul [1 ]
Wyatt, Peter [1 ]
Keast, Craig [1 ]
机构
[1] MIT, Lincoln Lab, Lexington, MA 02420 USA
[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
基金
美国国家科学基金会;
关键词
Carbon CVD; carbon transistors; chemical-vapor deposition (CVD); epitaxial graphene; graphene; graphene transistors; FILMS;
D O I
10.1109/LED.2009.2020615
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Graphene transistors are made by transferring a thin graphene film grown on Ni onto an insulating SiO(2) substrate. The properties and integration of these graphene-on-insulator transistors are presented and compared to the characteristics of devices made from graphitized SiC and exfoliated graphene flakes.
引用
收藏
页码:745 / 747
页数:3
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