Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition

被引：4877

作者：

Reina, Alfonso ^{[2
]}

Jia, Xiaoting ^{[2
]}

Ho, John ^{[1
]}

Nezich, Daniel ^{[3
]}

Son, Hyungbin ^{[1
]}

Bulovic, Vladimir ^{[1
]}

Dresselhaus, Mildred S. ^{[1
,3
]}

Kong, Jing ^{[1
]}

机构：

[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[3] MIT, Dept Phys, Cambridge, MA 02139 USA

来源：

NANO LETTERS | 2009年 / 9卷 / 01期

基金：

美国国家科学基金会;

关键词：

SILVER ATOMS; GRAPHITE; MONOLAYER; NICKEL; PHASE; GAS; ADSORPTION; DEVICES; PT(111);

D O I：

10.1021/nl801827v

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

In this work we present a low cost and scalable technique, via ambient pressure chemical vapor deposition (CVD) on polycrystalline Ni films, to fabricate large area (similar to cm(2)) films of single- to few-layer graphene and to transfer the films to nonspecific substrates. These films consist of regions of 1 to similar to 12 graphene layers. Single- or bilayer regions can be up to 20 mu m in lateral size. The films are continuous over the entire area and can be patterned lithographically or by prepatterning the underlying Ni film. The transparency, conductivity, and ambipolar transfer characteristics of the films suggest their potential as another materials candidate for electronics and opto-electronic applications.

引用

页码：30 / 35

页数：6

共 44 条

[1] Visibility of graphene flakes on a dielectric substrate
Abergel, D. S. L.
Russell, A.
Fal'ko, Vladimir I.
[J]. APPLIED PHYSICS LETTERS, 2007, 91 (06)
[2] LATTICE CONSTANTS OF GRAPHITE AT LOW TEMPERATURES
BASKIN, Y
MEYER, L
[J]. PHYSICAL REVIEW, 1955, 100 (02): : 544 - 544
[3] Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics
Berger, C
Song, ZM
Li, TB
Li, XB
Ogbazghi, AY
Feng, R
Dai, ZT
Marchenkov, AN
Conrad, EH
First, PN
de Heer, WA
[J]. JOURNAL OF PHYSICAL CHEMISTRY B, 2004, 108 (52) : 19912 - 19916
[4] Electronic confinement and coherence in patterned epitaxial graphene
Berger, Claire
Song, Zhimin
Li, Xuebin
Wu, Xiaosong
Brown, Nate
Naud, Cecile
Mayou, Didier
Li, Tianbo
Hass, Joanna
Marchenkov, Atexei N.
Conrad, Edward H.
First, Phillip N.
de Heer, Wait A.
[J]. SCIENCE, 2006, 312 (5777) : 1191 - 1196
[5] Making graphene visible
Blake, P.
Hill, E. W.
Castro Neto, A. H.
Novoselov, K. S.
Jiang, D.
Yang, R.
Booth, T. J.
Geim, A. K.
[J]. APPLIED PHYSICS LETTERS, 2007, 91 (06)
[6] Ultrahigh electron mobility in suspended graphene
Bolotin, K. I.
Sikes, K. J.
Jiang, Z.
Klima, M.
Fudenberg, G.
Hone, J.
Kim, P.
Stormer, H. L.
[J]. SOLID STATE COMMUNICATIONS, 2008, 146 (9-10) : 351 - 355
[7] Intrinsic and extrinsic performance limits of graphene devices on SiO2
Chen, Jian-Hao
Jang, Chaun
Xiao, Shudong
Ishigami, Masa
Fuhrer, Michael S.
[J]. NATURE NANOTECHNOLOGY, 2008, 3 (04) : 206 - 209
[8] Structural coherency of graphene on Ir(111)
Coraux, Johann
N'Diaye, Alpha T.
Busse, Carsten
Michely, Thomas
[J]. NANO LETTERS, 2008, 8 (02) : 565 - 570
[9] Large-area ultrathin films of reduced graphene oxide as a transparent and flexible electronic material
Eda, Goki
Fanchini, Giovanni
Chhowalla, Manish
[J]. NATURE NANOTECHNOLOGY, 2008, 3 (05) : 270 - 274
[10] Raman spectrum of graphene and graphene layers
Ferrari, A. C.
Meyer, J. C.
Scardaci, V.
Casiraghi, C.
Lazzeri, M.
Mauri, F.
Piscanec, S.
Jiang, D.
Novoselov, K. S.
Roth, S.
Geim, A. K.
[J]. PHYSICAL REVIEW LETTERS, 2006, 97 (18)

← 1 2 3 4 5 →