Bidirectional actuation of ferrofluid using micropatterned planar coils assisted by bias magnetic fields

被引:14
作者
Assadsangabi, B. [1 ]
Ali, M. S. Mohamed [1 ,2 ]
Takahata, K. [1 ]
机构
[1] Univ British Columbia, Dept Elect & Comp Engn, Vancouver, BC V6T1Z4, Canada
[2] Univ Teknologi Malaysia, Fac Elect Engn, Skudai 81310, Johor, Malaysia
基金
加拿大自然科学与工程研究理事会; 加拿大创新基金会;
关键词
Ferrofluid; Magnetic actuation; Planar coils; MEMS; Active mirrors; MICROPUMP; FLUID;
D O I
10.1016/j.sna.2011.11.007
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
080906 [电磁信息功能材料与结构]; 082806 [农业信息与电气工程];
摘要
This paper reports a ferrofluid control method that enables both attraction and repelling of ferrofluid on micropatterned planar coils coupled with permanent magnets. A combinational use of a controlled magnetic field and a bias field is shown to provide lateral forces that attract/repel the ferrolluid to/from the coil depending on the direction of the current passed through the coil. Active mirror devices whose mirrors are switched by ferrofluids are developed as a proof-of-concept of the actuation method toward the application to imaging devices and optical switches. The planar devices lithographically fabricated to have arrays of mirror-coil cells are used to demonstrate activation/deactivation of individual cells enabled by the bidirectional radial motion of the ferrofluid layer with similar to 100 mu m thickness. The static and dynamic behaviors of the ferrofluid in the devices are characterized through an image processing approach. Multiple mirror cells are selectively and simultaneously operated to show enhanced ferrofluid control uniquely available with the two modes of the actuation as well as to demonstrate pattern generation with the arrays. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:219 / 226
页数:8
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