共 17 条
[1]
AHN JJ, 2002, IEEE EMBS SPEC TOP C
[2]
[Anonymous], 2001, BIOCHIP TECHNOLOGY
[4]
CONSTANCE WM, 1973, MAGNETIC FLUIDS MAGN
[5]
NORMALLY CLOSED MICROVALVE AND MICROPUMP FABRICATED ON A SILICON-WAFER
[J].
SENSORS AND ACTUATORS,
1989, 20 (1-2)
:163-169
[6]
Fuhr G., 1992, Journal of Microelectromechanical Systems, V1, P141, DOI 10.1109/84.186393
[7]
GREVELL NE, 1997, IEEE T BIOMED ENG, V44
[8]
HATCH A, 2001, J MICROECLE SYS, V10
[10]
Kovacs G.T., 1998, Micromachined Transducers Sourcebook