Characterization and modeling of a CMOS-compatible MEMS technology

被引:13
作者
Latorre, L
Nouet, P
Bertrand, Y
Hazard, P
Pressecq, F
机构
[1] Univ Montpellier 2, LIRMM, CNRS, UMR 5506, F-34392 Montpellier, France
[2] Schneider Elect, Nanterre, France
[3] CNES, Qual Assurance Delegat, Toulouse, France
关键词
mechanical properties; micro-electromechanical sensors; front-side bulk micromachining (FSBM); modeling; test structures; simulation;
D O I
10.1016/S0924-4247(98)00345-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper we present a new methodology for efficient electromechanical characterization of a CMOS-compatible micro-electro mechanical sensors (MEMS) technology. Using an original test structure, the so-called 'U-shape cantilever beam', we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electromechanical relations that can be used for the design of Microsystems have been also developed. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:143 / 147
页数:5
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