Determination of the phase of the diffracted field in the optical domain -: Application to the reconstruction of surface profiles

被引：20

作者：

Destouches, N ^{[1
]}

Guérin, CA ^{[1
]}

Lequime, M ^{[1
]}

Giovannini, H ^{[1
]}

机构：

[1] Ecole Natl Super Phys Marseille, CNRS, Inst Fresnel, F-13397 Marseille 20, France

来源：

OPTICS COMMUNICATIONS | 2001年 / 198卷 / 4-6期

关键词：

optics; interferometry; scattering; diffraction; phase; inverse problem;

D O I：

10.1016/S0030-4018(01)01478-X

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose an experimental set-up working in the optical domain for determining the phase of the field diffracted by an object. We show that our apparatus can be used to reconstruct the deterministic profile of rough surfaces. We consider the particular case of diffraction gratings. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：233 / 239

页数：7

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