Measurement of roughness of two interfaces of a dielectric film by scattering ellipsometry

被引：28

作者：

Germer, TA ^{[1
]}

机构：

[1] NIST, Opt Technol Div, Gaithersburg, MD 20899 USA

来源：

PHYSICAL REVIEW LETTERS | 2000年 / 85卷 / 02期

关键词：

D O I：

10.1103/PhysRevLett.85.349

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The polarization of light scattered by oxide films thermally grown on photolithographically generated microrough silicon surfaces was measured as functions of scattering angle, Using the predictions of first-order vector perturbation theory for scattering from interfacial roughness to interpret the results, the roughness of each interface and the correlation function between the two interfaces can be determined. The results show the spatial frequency dependence of the SiO2/Si interface smoothening.

引用

收藏

页码：349 / 352

页数：4

相关论文

共 30 条

[1] FROM LIGHT-SCATTERING TO THE MICROSTRUCTURE OF THIN-FILM MULTILAYERS [J].

AMRA, C .

APPLIED OPTICS, 1993, 32 (28) :5481-5491

[2] COMPARISON OF SURFACE AND BULK SCATTERING IN OPTICAL MULTILAYERS [J].

AMRA, C ;

GREZESBESSET, C ;

BRUEL, L .

APPLIED OPTICS, 1993, 32 (28) :5492-5503

[3] ROLE OF INTERFACE CORRELATION IN LIGHT-SCATTERING BY A MULTILAYER [J].

AMRA, C ;

APFEL, JH ;

PELLETIER, E .

APPLIED OPTICS, 1992, 31 (16) :3134-3151

[4]

Barrick D.E., 1970, Radar Cross Section Handbook

[5] KINETIC SMOOTHENING - GROWTH THICKNESS DEPENDENCE OF THE INTERFACE WIDTH OF THE SI(001)/SIO2 INTERFACE [J].

DAWSON, JL ;

KRISCH, K ;

EVANSLUTTERODT, KW ;

TANG, MT ;

MANCHANDA, L ;

GREEN, ML ;

BRASEN, D ;

HIGASHI, GS ;

BOONE, T .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) :4746-4749

[6] Ellipsometry of light scattering from multilayer coatings [J].

Deumie, C ;

Giovannini, H ;

Amra, C .

APPLIED OPTICS, 1996, 35 (28) :5600-5608

[7] MULTILAYER-COATED OPTICS - GUIDED-WAVE COUPLING AND SCATTERING BY MEANS OF INTERFACE RANDOM ROUGHNESS [J].

ELSON, JM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1995, 12 (04) :729-742

[8] LIGHT-SCATTERING FROM SURFACES WITH A SINGLE DIELECTRIC OVERLAYER [J].

ELSON, JM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1976, 66 (07) :682-694

[9] IR LIGHT-SCATTERING FROM SURFACES COVERED WITH MULTIPLE DIELECTRIC OVERLAYERS [J].

ELSON, JM .

APPLIED OPTICS, 1977, 16 (11) :2872-2881

[10] The evolution of (001) Si/SiO2 interface roughness during thermal oxidation [J].

Fang, SJ ;

Chen, W ;

Yamanaka, T ;

Helms, CR .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1997, 144 (08) :2886-2893