Ellipsometry of light scattering from multilayer coatings

被引：30

作者：

Deumie, C

Giovannini, H

Amra, C

机构：

[1] Laboratoire d’Optique des Surfaces et des Couches Minces, Ecole Nationale Supérieure de Physique de Marseille, Unité de Recherche Associée au Centre National de la Recherche Scientifique 1120, Marseille Cedex 20

来源：

APPLIED OPTICS | 1996年 / 35卷 / 28期

关键词：

scattering; ellipsometry; surface roughness; bulk inhomogeneity; thin films; optical coatings; localized defects; cross correlation; polarization ratio;

D O I：

10.1364/AO.35.005600

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A scatterometer is extended and allows us to perform ellipsometric measurements on scattered light in each direction of space. Experimental data are given for single thin-film layers and optical coatings and reveal unexpected results. The phenomena are investigated by means of the electromagnetic theories of surface and bulk scattering that emphasize the role of partial correlation and localized defects. (C) 1996 Optical Society of America

引用

页码：5600 / 5608

页数：9

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[9]

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[10]

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