COMPARISON OF SURFACE AND BULK SCATTERING IN OPTICAL MULTILAYERS

被引:124
作者
AMRA, C
GREZESBESSET, C
BRUEL, L
机构
[1] Laboratoire d'Optique des Surfaces et des Couches Minces, Unite de Recherche (1120) Associee au Centre National de la Recherche Scientifique, Ecole Nationale Sup6rieure de Physique de Marseille Domaine Universitaire de St. Jer6me
来源
APPLIED OPTICS | 1993年 / 32卷 / 28期
关键词
THIN-FILM MULTILAYERS; SURFACE AND BULK SCATTERING; ROUGHNESS; INHOMOGENEITY; CROSS-CORRELATION COEFFICIENT;
D O I
10.1364/AO.32.005492
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Electromagnetic theories provide a tool to detect the origin of scattering in optical multilayers. Illumination and observation conditions that cause surface and bulk scatterings to have different behaviors are pointed out. Angular, wavelength, and polarization dependences are investigated for the location of structural irregularities at interfaces or in the bulk of a multilayer. Specific experiments can be designed.
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页码:5492 / 5503
页数:12
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