FROM LIGHT-SCATTERING TO THE MICROSTRUCTURE OF THIN-FILM MULTILAYERS

被引：96

作者：

AMRA, C

机构：

[1] Laboratoire d'Optique des Surfaces et des Couches Minces, Unite de Recherche (1120) Associee au Centre National de la Recherche Scientifique, Ecole Nationale Sup6rieure de Physique de Marseille Domaine Universitaire de St. Jer6me

来源：

APPLIED OPTICS | 1993年 / 32卷 / 28期

关键词：

THIN-FILM MULTILAYERS; LIGHT SCATTERING; SURFACE ROUGHNESS; BULK INHOMOGENEITY; CROSS-CORRELATION LAWS; ISOTROPY DEGREE; REPLICATION FUNCTIONS; LOCAL DEFECTS; MEASURABLE BANDWIDTH;

D O I：

10.1364/AO.32.005481

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

It is shown how light scattering provides a powerful tool for thin-film characterization. The introduction of a roughness isotropy degree permits the extraction of structural parameters of the stacks. Replication functions and residual roughnesses are given for TiO2, SiO2, and Ta2O5 materials produced by ion-assisted deposition and ion plating. Additional confirmation is given by measurements of scattering versus wavelength. The sensitivity of design to material and substrate effects is studied. At low-loss levels, surface and bulk phenomena are discussed together. Microstructure is characterized in the frequency bandwidth given by experiment.

引用

页码：5481 / 5491

页数：11

共 32 条

[1]

AMRA C, 1990, P SOC PHOTO-OPT INS, V1270, P72, DOI 10.1117/12.20366

[2] CALCULATION AND MEASUREMENT OF SCATTERING FOR INVESTIGATION OF MICROROUGHNESS IN OPTICAL COATINGS [J].

AMRA, C .

JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE, 1990, 21 (03) :83-98

[3] COMPARISON OF SURFACE AND BULK SCATTERING IN OPTICAL MULTILAYERS [J].

AMRA, C ;

GREZESBESSET, C ;

BRUEL, L .

APPLIED OPTICS, 1993, 32 (28) :5492-5503

[4] ROLE OF INTERFACE CORRELATION IN LIGHT-SCATTERING BY A MULTILAYER [J].

AMRA, C ;

APFEL, JH ;

PELLETIER, E .

APPLIED OPTICS, 1992, 31 (16) :3134-3151

[5] INTERFACE ROUGHNESS CROSS-CORRELATION LAWS DEDUCED FROM SCATTERING DIAGRAM MEASUREMENTS ON OPTICAL MULTILAYERS - EFFECT OF THE MATERIAL GRAIN-SIZE [J].

AMRA, C ;

ROCHE, P ;

PELLETIER, E .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1987, 4 (07) :1087-1093

[6] THEORY AND APPLICATION OF ANTISCATTERING SINGLE LAYERS - ANTISCATTERING ANTIREFLECTION COATINGS [J].

AMRA, C ;

ALBRAND, G ;

ROCHE, P .

APPLIED OPTICS, 1986, 25 (16) :2695-2702

[7] 1ST-ORDER VECTOR THEORY OF BULK SCATTERING IN OPTICAL MULTILAYERS [J].

AMRA, C .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1993, 10 (02) :365-374

[8]

AMRA C, IN PRESS J OPT SOC A

[9]

AMRA C, 1990, P SOC PHOTO-OPT INST, V1438, P309

[10]

AMRA C, UNPUB APPL OPT

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