Optimization of an integrated SnO2 gas sensor using a FEM simulator

The application of a commercially available coupled electrothermal simulation software (SESES(TM)) to the design and performance of an SnO2 chemical sensor is presented. The resulting temperature distribution over a thin silicon membrane and the heating power consumption have been obtained fnr realistic device structures and compared with experimental measurments. Starting from an existing design thp excellent correlation between the measured and simulated results allows us to arrive at an adjusted model using suitable coefficients. Using this model, a new design is proposed allowing better thermal performance and lower power consumption, as confirmed by the experimental measurements. (C) 1998 Elsevier Science S.A. All rights reserved.