Thermomechanical noise limits on parametric sensing with nanomechanical resonators

被引:79
作者
Cleland, AN [1 ]
机构
[1] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA
来源
NEW JOURNAL OF PHYSICS | 2005年 / 7卷
关键词
D O I
10.1088/1367-2630/7/1/235
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Measuring and monitoring the dynamic parameters of a nanomechanical resonator, in particular the resonance frequency, has received significant attention recently, in part due to the possibility of very sensitive, fast and precise mass sensing. Added mass can include chemisorbed or physisorbed metals or organic molecules, and if sufficiently high sensitivity, dynamic range and detector speed can be achieved, they could have applications in, e. g., proteomics. Here, I investigate some of the fundamental limits to mass sensing in such resonators, discussing the limits imposed by thermomechanical noise on both the linear operating regime of a simple harmonic oscillator, and the equivalent limits on nonlinear parametric amplifiers used as parametric sensors. The model system is a cantilevered flexural resonator, but the results apply equally well (in most cases) to doubly clamped or torsional resonant structures as well.
引用
收藏
页数:16
相关论文
共 16 条
[1]   FREQUENCY-MODULATION DETECTION USING HIGH-Q CANTILEVERS FOR ENHANCED FORCE MICROSCOPE SENSITIVITY [J].
ALBRECHT, TR ;
GRUTTER, P ;
HORNE, D ;
RUGAR, D .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (02) :668-673
[2]   STATISTICS OF ATOMIC FREQUENCY STANDARDS [J].
ALLAN, DW .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (02) :221-&
[3]   Noise processes in nanomechanical resonators [J].
Cleland, AN ;
Roukes, ML .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (05) :2758-2769
[4]  
Cleland AN, 2002, FDN NANOMECHANICS
[5]  
Egan W.F., 1981, FREQUENCY SYNTHESIS
[6]   Ultrasensitive nanoelectromechanical mass detection [J].
Ekinci, KL ;
Huang, XMH ;
Roukes, ML .
APPLIED PHYSICS LETTERS, 2004, 84 (22) :4469-4471
[7]   MECHANICAL-THERMAL NOISE IN MICROMACHINED ACOUSTIC AND VIBRATION SENSORS [J].
GABRIELSON, TB .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (05) :903-909
[8]   Real-time mass sensing by nanomechanical resonators in fluid [J].
Ghatkesar, MK ;
Barwich, V ;
Braun, T ;
Bredekamp, AH ;
Drechsler, U ;
Despont, M ;
Lang, HP ;
Hegner, M ;
Gerber, C .
PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, :1060-1063
[9]   Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography [J].
Ghatnekar-Nilsson, S ;
Forsén, E ;
Abadal, G ;
Verd, J ;
Campabadal, F ;
Pérez-Murano, F ;
Esteve, J ;
Barniol, N ;
Boisen, A ;
Montelius, L .
NANOTECHNOLOGY, 2005, 16 (01) :98-102
[10]   Attogram detection using nanoelectromechanical oscillators [J].
Ilic, B ;
Craighead, HG ;
Krylov, S ;
Senaratne, W ;
Ober, C ;
Neuzil, P .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (07) :3694-3703