Miniaturized chemical multiplexed sensor array

Miniaturized tin oxide semiconductor sensors are fabricated directly by site-specific dip-pen nanopatterning using precursor inks derived from the sol-gel method. The good flow characteristics and strong affinity of the sols to measurement electrodes enable intimate contact. The measurable, reproducible, and proportionate changes in the resistance of the sensors when exposed to trace quantities of oxidative and reducing gases constitute the basis for such sensors. These sensors show rapid response and ultrafast recovery for the detection of nitrogen dioxide and acetic acid. Furthermore, an array of eight miniaturized sensors is created by doping the pristine tin-based sol ink with different metal ions; the different responses of each sensor to certain gases constitute a reference response spectrum that can be used to recognize the gas. Such recognition ability, instant response and rapid recovery, compact size, and integration with the current microelectronics platform make the miniaturized sensor array a significant development for the on-site and real-time detection of life-threatening gases. Copyright © 2003 American Chemical Society.