Plasma-assisted molecular beam epitaxy of high optical quality MgZnO films on Zn-polar ZnO substrates

被引：49

作者：

Nishimoto, Yoshio ^{[1
]}

Nakahara, Ken ^{[1
]}

Takamizu, Daiju ^{[1
]}

Sasaki, Atsushi ^{[1
]}

Tamura, Kentaro ^{[1
]}

Akasaka, Shunsuke ^{[1
]}

Yuji, Hiroyuki ^{[1
]}

Fujii, Tetsuo ^{[1
]}

Tanabe, Tetsuhiro ^{[1
]}

Takasu, Hidemi ^{[1
]}

Tsukazaki, Atsushi ^{[2
]}

Ohtomo, Akira ^{[2
]}

Onuma, Takeyoshi ^{[3
]}

Chichibu, Shigefusa F. ^{[3
]}

Kawasaki, Masashi ^{[2
,4
,5
]}

机构：

[1] ROHM Co Ltd, Adv Compound Semicond R&D Ctr, Kyoto 6158585, Japan

[2] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan

[3] Tohoku Univ, CANTech, Inst Multidisciplinary Res Adv Mat, Sendai, Miyagi 9808577, Japan

[4] Tohoku Univ, WPI Adv Inst Mat Res AIMR, Sendai, Miyagi 9808577, Japan

[5] Japan Sci & Technol Agcy, CREST, Tokyo 1020075, Japan

来源：

APPLIED PHYSICS EXPRESS | 2008年 / 1卷 / 09期

关键词：

D O I：

10.1143/APEX.1.091202

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The excellent structural and optical properties of pseudomorphic MgxZn1-xO films (0 <= x <= 0.39) are reported in this work. The MgxZn1-xO films were grown on Zn-polar ZnO substrates by plasma-assisted molecular beam epitaxy. Those MgxZn1-xO films for which x <= 0.18 exhibited atomically flat surfaces, and the typical full-width-at-half-maximum (FWHM) value of the (0002) X-ray diffraction omega-rocking curves for these films was 35 arcsec. The FWHM values were less than 100 meV for the near-band-edge photoluminescence (PL) at 300 K. We observed PL lifetimes of the order of ns, and the longest fast-decay component reached 3.5 ns for the Mg0.12Zn0.88O alloy. (C) 2008 The Japan Society of Applied Physics.

引用

页码：0912021 / 0912023

页数：3

共 12 条

[1] Improvements in quantum efficiency of excitonic emissions in ZnO epilayers by the elimination of point defects [J].

Chichibu, S. F. ;

Onuma, T. ;

Kubota, M. ;

Uedono, A. ;

Sota, T. ;

Tsukazaki, A. ;

Ohtomo, A. ;

Kawasaki, M. .

JOURNAL OF APPLIED PHYSICS, 2006, 99 (09)

[2]

Hiramatsu K, 1997, MRS INTERNET J N S R, V2, pU3

[3] Structural and optical properties of hexagonal MgxZn1-xO thin films [J].

Jin, Chunming ;

Narayan, Roger J. .

JOURNAL OF ELECTRONIC MATERIALS, 2006, 35 (05) :869-876

[4] Recombination dynamics of excitons in Mg0.11Zn0.89O alloy films grown using the high-temperature-annealed self-buffer layer by laser-assisted molecular-beam epitaxy [J].

Kubota, Masashi ;

Onuma, Takeyoshi ;

Tsukazaki, Atsushi ;

Ohtomo, Akira ;

Kawasaki, Masashi ;

Sota, Takayuki ;

Chichibu, Shigefusa F. .

APPLIED PHYSICS LETTERS, 2007, 90 (14)

[5] First-principles study of polarization in Zn1-xMgxO [J].

Malashevich, Andrei ;

Vanderbilt, David .

PHYSICAL REVIEW B, 2007, 75 (04)

[6] MgxZn1-xO as a II-VI widegap semiconductor alloy [J].

Ohtomo, A ;

Kawasaki, M ;

Koida, T ;

Masubuchi, K ;

Koinuma, H ;

Sakurai, Y ;

Yoshida, Y ;

Yasuda, T ;

Segawa, Y .

APPLIED PHYSICS LETTERS, 1998, 72 (19) :2466-2468

[7] Radical-source molecular beam epitaxy of ZnMgO and ZnCdO alloys on ZnO substrates [J].

Sadofev, S. ;

Schaefer, P. ;

Fan, Y. -H. ;

Blumstengel, S. ;

Henneberger, F. ;

Schulz, D. ;

Klimm, D. .

APPLIED PHYSICS LETTERS, 2007, 91 (20)

[8] Molecular beam epitaxy of high magnesium content single-phase wurzite MgxZn1-xO alloys (x ≃ 0.5) and their application to solar-blind region photodetectors [J].

Takagi, T ;

Tanaka, H ;

Fujita, S ;

Fujita, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2003, 42 (4B) :L401-L403

[9] Direct correlation between the internal quantum efficiency and photoluminescence lifetime in undoped ZnO epilayers grown on Zn-polar ZnO substrates by plasma-assisted molecular beam epitaxy [J].

Takamizu, D. ;

Nishimoto, Y. ;

Akasaka, S. ;

Yuji, H. ;

Tamura, K. ;

Nakahara, K. ;

Onuma, T. ;

Tanabe, T. ;

Takasu, H. ;

Kawasaki, M. ;

Chichibu, S. F. .

JOURNAL OF APPLIED PHYSICS, 2008, 103 (06)

[10] Blue light-emitting diode based on ZnO [J].

Tsukazaki, A ;

Kubota, M ;

Ohtomo, A ;

Onuma, T ;

Ohtani, K ;

Ohno, H ;

Chichibu, SF ;

Kawasaki, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2005, 44 (20-23) :L643-L645

← 1 2 →