Low-temperature chemical vapor deposition of indium sulfide thin films using a novel single-source indium thiocarboxylate compound as precursor

被引：40

作者：

Shang, GH ^{[1
]}

Kunze, K ^{[1
]}

HampdenSmith, MJ ^{[1
]}

Duesler, EN ^{[1
]}

机构：

[1] UNIV NEW MEXICO,CTR MICROENGN MAT,ALBUQUERQUE,NM 87131

来源：

CHEMICAL VAPOR DEPOSITION | 1996年 / 2卷 / 06期

关键词：

D O I：

10.1002/cvde.19960020606

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The optoelectronic properties of gallium and indium chalcogenides have attracted considerable attention in recent years This paper describes the synthesis and characterization of the first monomeric indium thiocarboxylate CVD precursor, with the molecular structure shown in the Figure. This compound has been successfully used to grow high purity, uniform, crystalline beta-In2S3 by aerosol-assisted CVD at the lowest temperature (210 degrees C) yet reported.

引用

页码：242 / &

页数：4

共 20 条

[1] TEMPERATURE-MODULATED REFLECTANCE OF GASE AT GROUND STATE EXCITON LINE [J].

BALZAROTTI, A ;

GRANDOLFO, M ;

SOMMA, F ;

VECCHIA, P .

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1971, 44 (02) :713-+

[2]

BARRON AR, 1994, MATER RES SOC SYMP P, V335, P317

[3] METAL CHALCOGENIDE CLUSTER CHEMISTRY [J].

DANCE, I ;

FISHER, K .

PROGRESS IN INORGANIC CHEMISTRY, VOL 41, 1994, 41 :637-803

[4]

DOWNS AJ, 1993, CHEM ALUMINIUM GALLI, P322

[5] OPTO-ELECTRONIC PROPERTIES OF GALLIUM CHALCOGENIDES [J].

GUPTA, VP ;

SRIVASTAVA, VK .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1981, 42 (12) :1071-1077

[6] MOLECULAR DESIGN OF SINGLE-SOURCE PRECURSORS FOR 3-6 SEMICONDUCTOR-FILMS - CONTROL OF PHASE AND STOICHIOMETRY IN INXSEY FILMS DEPOSITED BY A SPRAY MOCVD PROCESS USING SINGLE-SOURCE REAGENTS [J].

GYSLING, HJ ;

WERNBERG, AA ;

BLANTON, TN .

CHEMISTRY OF MATERIALS, 1992, 4 (04) :900-905

[7] SYNTHESIS AND CHARACTERIZATION OF SOME MIXED ALKYL THIOCARBAMATES OF GALLIUM AND INDIUM, PRECURSORS FOR III/IV-MATERIALS - THE X-RAY SINGLE-CRYSTAL STRUCTURES OF DIMETHYLINDIUM AND DIETHYLINDIUM DIETHYLDITHIOCARBAMATES [J].

HAGGATA, SW ;

MALIK, MA ;

MOTEVALLI, M ;

OBRIEN, P ;

KNOWLES, JC .

CHEMISTRY OF MATERIALS, 1995, 7 (04) :716-724

[8]

HAWSEN HD, 1973, J ORGANOMET CHEM, V57, P243

[9] OPTICAL-ENERGY GAPS OF BETA-IN2S3 THIN-FILMS GROWN BY SPRAY PYROLYSIS [J].

KIM, WT ;

KIM, CD .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (07) :2631-2633

[10]

Kodas T.T., 1994, The Chemistry of Metal CVD

← 1 2 →