Enhanced nucleation of diamond films on pretreated substrates

被引：31

作者：

Buck, V ^{[1
]}

Deuerler, F

机构：

[1] Univ Essen Gesamthsch, FB Phys, D-45117 Essen, Germany

[2] Fachhsch Gelsenkirchen, FB Maschinenbau, Abt Bocholt, Gelsenkirchen, Germany

来源：

关键词：

diamond films; pretreatment; intermediate layers; cutting tools;

D O I：

10.1016/S0925-9635(98)00237-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

One interesting application of polycrystalline diamond films is the coating of cutting tools. The main problem herewith-the poor adhesion of the films-has been successfully overcome using mechanical or chemical pretreatments or intermediate layers. Besides adhesion, a significant aspect of film quality and performance is connected to size and orientation of the diamond grains, which depends on nucleation. In these investigations, different mechanical and chemical pretreatments as well as intermediate layers are produced to examine their influence on nucleation density, orientation of nuclei, etc. The effects of pretreatment on the nucleation process have been studied by EDX and scanning electron microscopy. It has been shown, for example, that the nucleation density can be significantly enhanced if combined methods of pretreatment are used. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：1544 / 1552

页数：9

共 45 条

[41] Activation energy for diamond growth from the carbon-hydrogen gas system at low substrate temperatures [J].