Silicon surface passivation by organic monolayers:: Minority charge carrier lifetime measurements and Kelvin probe investigations

被引:63
作者
Sieval, AB
Huisman, CL
Schönecker, A
Schuurmans, FM
van der Heide, ASH
Goossens, A
Sinke, WC
Zuilhof, H
Sudhölter, EJR
机构
[1] Univ Wageningen & Res Ctr, Organ Chem Lab, NL-6703 HB Wageningen, Netherlands
[2] Delft Univ Technol, Dept Chem Technol, Inorgan Chem Lab, NL-2628 BL Delft, Netherlands
[3] Energy Res Ctr Netherlands, NL-1755 ZG Petten, Netherlands
关键词
D O I
10.1021/jp034314v
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The silicon surface passivation of monolayers of organic compounds that are bound to Si surfaces by a covalent Si-C bond has been investigated. The effective lifetime tau(eff) of minority charge carriers in the surface-modified semiconductor has been determined by modulated free carrier absorption (MFCA) measurements. The results show that on 1-2 Ohm.cm p-type Si(100) surfaces modified with a monolayer obtained from CH2=CH-(CH2)(8)-C(=O)-O-CH3 maximum effective lifetimes tau(eff) greater than or equal to 130 mus can be obtained. This value corresponds to a maximum surface recombination velocity S-eff of 120 cm/s, a value that is similar to those obtained using other passivation techniques, which demonstrates that these monolayers provide an interesting alternative for silicon surface passivation. During these MFCA measurements an unusual time dependence of the effective lifetime is observed: tau(eff) rises continuously during illumination of the substrate. Kelvin probe measurements show that there is a slow shift of the Fermi level of the semiconductor under illumination, which seems to be the result of a slow, reversible filling of surface traps.
引用
收藏
页码:6846 / 6852
页数:7
相关论文
共 48 条
[41]   Novel method for minority-carrier mobility measurement using photoconductance decay with chemically passivated and plasma damaged surfaces [J].
Stephens, AW ;
Green, MA .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (07) :3897-3903
[42]   Thermal behavior of alkyl monolayers on silicon surfaces [J].
Sung, MM ;
Kluth, GJ ;
Yauw, OW ;
Maboudian, R .
LANGMUIR, 1997, 13 (23) :6164-6168
[43]   Determination of the bonding of alkyl monolayers to the Si(111) surface using chemical-shift, scanned-energy photoelectron diffraction [J].
Terry, J ;
Linford, MR ;
Wigren, C ;
Cao, RY ;
Pianetta, P ;
Chidsey, CED .
APPLIED PHYSICS LETTERS, 1997, 71 (08) :1056-1058
[44]   Alkyl-terminated Si(111) surfaces: A high-resolution, core level photoelectron spectroscopy study [J].
Terry, J ;
Linford, MR ;
Wigren, C ;
Cao, RY ;
Pianetta, P ;
Chidsey, CED .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (01) :213-221
[45]   Organic modification of hydrogen terminated silicon surfaces [J].
Wayner, DDM ;
Wolkow, RA .
JOURNAL OF THE CHEMICAL SOCIETY-PERKIN TRANSACTIONS 2, 2002, (01) :23-34
[46]   Comparison of the electrical properties and chemical stability of crystalline silicon(111) surfaces alkylated using grignard reagents or olefins with Lewis acid catalysts [J].
Webb, LJ ;
Lewis, NS .
JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (23) :5404-5412
[47]   AUGER RECOMBINATION IN SILICON AT LOW CARRIER DENSITIES [J].
YABLONOVITCH, E ;
GMITTER, T .
APPLIED PHYSICS LETTERS, 1986, 49 (10) :587-589
[48]   UNUSUALLY LOW SURFACE-RECOMBINATION VELOCITY ON SILICON AND GERMANIUM SURFACES [J].
YABLONOVITCH, E ;
ALLARA, DL ;
CHANG, CC ;
GMITTER, T ;
BRIGHT, TB .
PHYSICAL REVIEW LETTERS, 1986, 57 (02) :249-252