Stretchable interconnects for elastic electronic surfaces

被引:496
作者
Lacour, SP [1 ]
Jones, J
Wagner, S
Li, T
Suo, ZG
机构
[1] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA
[2] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
关键词
elastic electronics; elastomer; electronic surface; flexible structures; interconnects; metallization;
D O I
10.1109/JPROC.2005.851502
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Elastic electronic surfaces will integrate stiff thin film devices onto compliant polymer substrates. These surfaces maybe stretched once or many times, by up to tens of percent strain. One way to make such an elastic electronic surface is to distribute rigid subcircuit islands over the polymer surface, and then fabricate active devices on the islands. These islands need to be interconnected with stretchable metallization. We describe stretchable interconnects made of stripes of thin gold film patterned on elastomeric membranes. These membranes can be stretched by up to twice their initial length and maintain electrical conduction. We review the fabrication of these conductors, present their electrical and mechanical properties, and summarize our model for their extreme stretchability. Using such stretchable interconnects, we made the first elastic circuit, an inverter of thin film transistors. The circuit remains functional when stretched and relaxed by 12% strain.
引用
收藏
页码:1459 / 1467
页数:9
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