40,000 pixel arrays of ac-excited silicon microcavity plasma devices

Arrays of (50 mu m)(2) Si microcavity plasma devices, as large as 40 000 pixels (200x200) with a packing density of 10(4) pixels cm(-2), have been operated continuously in 500-900 Torr of Ne with ac excitation (5-20 kHz). More than two orders of magnitude larger than previously reported microplasma device arrays, 200x200 pixel structures produce uniform glow discharges in each pixel, have a power consumption of similar to 0.85 W cm(-2) for p(Ne)=700 Torr and an excitation frequency of 5 kHz, and exhibit maximum radiative efficiency for a Ne pressure of p(Ne)congruent to 700 Torr and an excitation frequency of 10-15 kHz. All arrays examined (10x10 -> 200x200) are characterized by pixel-to-pixel emission intensities constant over the entire array to within +/- 10%, and no barriers to the successful operation of much larger arrays are apparent. (C) 2005 American Institute of Physics.